| 摘要 |
PURPOSE:To obtain a large-area pattern which has an optional planar shape and an optional sectional shape by providing a central control unit, an XY stage controller, and a modulating element driving circuit. CONSTITUTION:While an XY stage 7 equipped with a photosensitive body 6 is moved in XY directions, the intensity of light is controlled and the photosensitive body 6 is exposed, so a desired exposure quantity is obtained at an optional position on the photosensitive body 6. In general, the depth of an uneven pattern obtained after the photosensitive body 6 is developed is determined corresponding to the exposure quantity of the photosensitive body 6, so an optical product having a desired sectional shape is obtained by varying the exposure quantity. Further, the measurement result of a length measuring meter 10 is inputted to a driving system controller 18 and compared with data indicating a position to adjust a signal outputted from the driving system controller 18 to devices 8 and 9 moving the XY stage 7. In this case, the position of the XY stage 7 can be controlled with high accuracy, so the optical product with high working accuracy is obtained. |
