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发明名称
NOVOLAK-CONTAINING PHOTORESIST COMPOSITION
摘要
申请公布号
IL94353(D0)
申请公布日期
1991.03.10
申请号
IL19900094353
申请日期
1990.05.10
申请人
ROHM AND HAAS COMPANY
发明人
分类号
G03F7/023;C08G8/00;C08G8/10;G03F7/00;G03F7/038;(IPC1-7):G03C/
主分类号
G03F7/023
代理机构
代理人
主权项
地址
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