MIM ELEMENT AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME

摘要

PURPOSE:To form an insulating film at relatively low temperature in a simple process and to design a device over a wide range by using a hard carbon film for the insulating film. CONSTITUTION:On an insulating substrate 1 where transparent picture element electrodes 2' are formed, a metallic thin film for a lower electrode is formed and patterned as specified to form the lower electrode 2, which is coated with a hard carbon film to form the insulating film by specific patterning. A metallic thin film for an upper electrode is formed thereupon by coating and patterned as specified to form the upper electrode 4 and an unnecessary part of the lower electrode 2 is removed to expose a transparent picture element electrode 2' as a picture element electrode. The hard carbon film used as the insulating film of this liquid crystal driving MIM (Metal-Insulator-Metal) element has 100-8000Angstrom film thickness and 10<6>-10<13> OMEGA.cm resistivity.