| 摘要 |
<p>A diffraction grating assembly is constructed from a silicon substrate (2). The diffraction grating assembly comprises a support member (1a) formed in a cavity (4) etched in the substrate (2). A diffraction grating (1) is formed on the support member (1a), and means (3) are provided for supporting the support member on the substrate (2) for pivotal movement. Means (5a, 5b) are also provided for controlling the pivotal movement of the support member (1a).</p> |
