| 摘要 |
PURPOSE:To provide an element which hardly receives mechanical external forces by constituting the element by a stage for producing the ridge type optical waveguides made of an org. crystal body, a stage for forming a layer consisting of a material having the refractive index lower than the refractive index of the org. crystal body and a stage for removing a resist and the layer consisting of the material having the refractive index lower than the refractive index of the org. crystal body on the resist. CONSTITUTION:The ridge type optical waveguides made of the org. crystal body are produced by applying a resist 3 sensitive to light to electron beams on the thin-film org. crystal body 2 formed on a substrate 1, exposing and developing the resist to a desired fine pattern, then etching the thin-film org. crystal body 2. The layer 4 consisting of the material having the refractive index lower than the refractive index of the org. crystal body 2 is formed by vapor deposition or sputtering on the optical waveguides made of the org. crystal body and the substrate in such a manner that the this layer is formed to the same film thickness as the film thickness of the org. crystal body 2. The resist 3 on the optical waveguides made of the org. crystal body and the layer 4 consisting of the material having the refractive index lower than the refractive index of the org. crystal body on the resist are then removed. Consequently, the element is substantially kept free from the mechanical external forces. and the scattering loss of the light is decreased. |
