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发明名称
FORMATION OF MULTILAYER WIRING
摘要
申请公布号
JPH0353532(A)
申请公布日期
1991.03.07
申请号
JP19890189247
申请日期
1989.07.21
申请人
SONY CORP
发明人
KENMOTSU HIDENORI;HASHIGUCHI TOSHIYA
分类号
H01L21/3213;H01L21/3205
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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