| 摘要 |
A magnetic levitation carrier apparatus of the type wherein a plate-like moving element (SFT) is moved by a linear motor disposed inside a fixing element (STT), wherein when the moving element is supported in a vertical direction by first to fourth electromagnet devices (MGV10 SIMILAR MGV41) and force is allowed to act on the moving element in a horizontal direction perpendicular to the moving direction by fifth and sixth electromagnet devices (MGH10 SIMILAR MGH21), the gap between the moving element and each electromagnet device is detected by a gap sensor so as to output gap data. As to the vertical direction, for example, an attraction command (fv1 SIMILAR fv2) is obtained from the output value of a feedback quantity calculation circuit (10) to which the gap data (Xv1 SIMILAR Xv4) are inputted and the output value of a variable gain gv (l) generation circuit (60) to which the position (l) of the centroid of the moving element is inputted and is linearized by a linearilization circuit (71 SIMILAR 74) and then outputted to each electromagnet. In this manner, the variable gain can be accomplished easily by an analog circuit and the control gain in each control direction can be given independently. |
