Corpuscular beam optical device - compensates for illumination and imaging errors in irradiation of flat sample slide

摘要

A corpuscular beam optical device for irradiation of a sample slide causes a corpuscular beam of given radius to move over the sample pattern. The illuminating beam from a narrow polychromatic beam source (1) is split into two. The source (1) is followed by a suitable fixed shutter (2) across the diameter of the beam. The beam is driven, with the help of two x-y diffraciton elements (3) in separate planes, to the incident plane of a strongly magnifying telescopic lens system (4) comprising two lenses (5). The telescopic system is compensated, with respect to the distortion and colour error of the image rotation and magnification, by computer controlled detectors. USE/ADVANTAGE - Microlithography of flat sample. Can process ten billion image points on surface of 20 mm diameter. Enables exact perpendicular illumination and reduces distortion.