| 摘要 |
PURPOSE:To alleviate operator's load by collecting the results of other analysis, and determining and outputting the final result of the analysis. CONSTITUTION:An analysis-procedure input means 31 is operated so that an analyzing point comes to a position where an electron beams is narrowed and projected. The coordinates of an actuator are registered in an analyzing-procedure register means 33. When the registration of all observed coordinates is finished, the initially set data of an EDX 16 and an EELS 17 are inputted with the means 31 and transduced into electric signals with an analyzing-system control means 32. Thereafter, the data are outputted into a common bus 15. The data are further inputted into the EDX 16 and the EELS 17. The EDX control part 22 and the EELS control part 23 are initially set. A sample is moved so that an electron beam is projected on an analyzing point by the means 32 and a microscope control part 21 in correspondence with the registered coordinate data. Then a photograph is taken. When the analyses at all analyzing points are finished, the results of the analyses in analysis-result memory means 36 and 37 of the EDX 16 and the EELS 17 are stored in analysis-result collecting means 34 with the means 32. An analysis-result determining and outputting means 35 obtains and outputs the final analysis result. In this way, the operation is performed with an operating means 14 of an electronic microscope, and a plurality of devices can be controlled all together. Therefore the operability can be improved. |
