| 摘要 |
PURPOSE:To execute the correction with high accuracy in a short time by emitting a laser light of a first laser beam, when an output of a photodetector is different from design data corresponding to a scanning means. CONSTITUTION:An He-Ne laser light scans on an object to be worked by a mirror 8 and a mirror 9 driven through a motor driver 19 by a signal from a command part 18. In this case, by an output of a photodetector 14, whether a circuit pattern exists or not is detected, and it is compared with design data 18 of the circuit pattern by a comparator 16. In that case, when the circuit pattern is different from the design data 18, a signal is outputted to a YAG laser controller 17 from the comparator 16. The YAG laser light source 17 emits a laser, when the signal of the comparator 16 is received, and executes trimming of the circuit pattern. |
