| 摘要 |
PURPOSE:To suppress the state change in the coupling part of waveguide by electrode formation and to stably obtain the optical control device having the same characteristics by providing gratings consisting of the same material as the material of electrodes on a dielectric crystal substrate and near the electrodes. CONSTITUTION:The control electrodes 5 are formed via a buffer film 6 on the lithium niobate crystal substrate 1 formed with the optical waveguides. Further, the gratings 10 consisting of the same material as the material of the control electrodes 5 are formed near the control electrodes 5. The gratings 10 are periodically formed by the same width and gap in parallel with the control voltage from the point apart from the control electrodes 5. The formation of the gratings 10 is executed simultaneously at the time of formation of the control electrodes 5 by etching after the electrode film is formed. The influence of the strains generated at the time of the electrode formation is decreased in this way and the optical control devices having the same characteristics are obtd. |
