APPARATUS FOR THERMAL TREATMENTS OF THIN PARTS SUCH AS SILICON WAFERS,申请号EP19870901501-传众专利搜索

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发明名称	APPARATUS FOR THERMAL TREATMENTS OF THIN PARTS SUCH AS SILICON WAFERS
摘要
申请公布号	EP0259414(B1)	申请公布日期	1991.03.06
申请号	EP19870901501	申请日期	1987.02.18
申请人	BERTIN & CIE SOCIETE ANONYME	发明人	JANNOT,MARCEL AUGUSTIN JOSEPH;PATUREAU, JEAN-PIERRE
分类号	H01L21/26;C21D1/34;C23C16/48;C30B33/00;F27B17/00;H01L21/00;H05B3/00	主分类号	H01L21/26
代理机构		代理人
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