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发明名称
ETCHING METHOD FOR PRODUCING AN ELECTROCHEMICAL CELL IN A SEMI-CONDUCTOR
摘要
申请公布号
EP0299600(A3)
申请公布日期
1991.03.06
申请号
EP19880304537
申请日期
1988.05.19
申请人
SRI INTERNATIONAL
发明人
HOLLAND, CHRISTOPHER E.;WESTERBERG, EUGENE R.;MADOU, MARK K.;OTAGAWA, TAKAAKI
分类号
B01J19/00;H01G9/00;(IPC1-7):H01M14/00;H01L21/308
主分类号
B01J19/00
代理机构
代理人
主权项
地址
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