SPINNING PIEZOELECTRIC BEAM OF A DUAL-AXIS ANGULAR RATE SENSOR AND METHOD OF ITS ADJUSTMENT

摘要

A method for adjusting a spinning piezoelectric beam of a dual-axis angular rate sensor, in which the spinning piezoelectric beam is excited in a direction at right angles to the lengthwise direction of two piezoelectric sensors (22a, 22b) and to a rotary shaft (21); detected voltages of the two piezoelectric sensors (22a, 22b) are measured by a signal measuring circuit (30); a bending portion of at least one of the two piezoelectric sensors is ground so that the levels of the two measured signals and the difference therebetween become small; the spinning piezoelectric beam (20) is excited again in the lengthwise direction of the piezoelectric sensors (22a, 22b) at right angles to the rotary shaft (21); detected voltages of the two piezoelectric sensors are measured by the signal measuring circuit (30); and a weight mounted on the free end of at least one of the two piezoelectric sensors is ground so that the levels of the two measured signals and the difference therebetween become small. Thus, acceleration components applied to the spinning piezoelectric beam, in the detected voltages of the two piezoelectric sensors, are rendered to have the same phase and the same amplitude. On both sides of each piezoelectric sensor there are formed electrodes which are spaced 1.5 times the thickness of the sensor from support washers (24).