| 摘要 |
PURPOSE:To manufacture a lighter X-Y table by catching a substrate with an external operation means made outside the X-Y table and releasing the substrate when the X-Y table returns to the origin. CONSTITUTION:When an X-Y table 11 is placed at the origin and a substrate 1 is sent to between guide rails 12 and 13, a lift 35 rises and a position reference member 30 and a presser member 31 appear on the substrate carrying plane. When the X-Y table 11 moves out of the origin, the energizing force of a spring 80 slides a slide unit and, following to that, the presser plate 31 approaches the position reference member 30 to catch the substrate 1. When the X-Y table 11 returns to the origin, an external operation means 85 releases the substrate 1. Thereby the weight of a burden imposed on the X-Y table 11 can be reduced. |
