| 发明名称 |
Forming a pattern on a substrate. |
| 摘要 |
<p>A pattern is formed on a substrate by providing on the substrate a dielectric composition; defining a pattern in said dielectric; depositing metal and then micromachining the metal to provide the desired pattern on the substrate.</p> |
| 申请公布号 |
EP0415131(A2) |
申请公布日期 |
1991.03.06 |
| 申请号 |
EP19900115044 |
申请日期 |
1990.08.04 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MIERSCH, EKKEHARD F.;PARK, JAE M. |
| 分类号 |
G03C1/00;C25F5/00;G03F1/08;H01L21/48;H05K3/04;H05K3/06;H05K3/10;H05K3/16;H05K3/24 |
主分类号 |
G03C1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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