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发明名称
SCRIBING APPARATUS
摘要
申请公布号
JPH0352226(A)
申请公布日期
1991.03.06
申请号
JP19890188536
申请日期
1989.07.20
申请人
TOKYO ELECTRON LTD;SHIOYA SEISAKUSHO:KK
发明人
USHIJIMA MITSURU;HASHIZUME MICHIHIRO
分类号
B08B1/04;H01L21/304
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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