| 摘要 |
PURPOSE:To accelerate processing by maintaing constant the distance between means for converging energy beam and the surface of a film to be processed by moving the converging means back and forth in the axial direction of the beam. CONSTITUTION:An objective lens i.e., a converging means for laser beam, is formed as a combination lens system of a convex lens 9 and a concave lens 10, and a process is conducted by longitudinal moving the lens 10 in the optical axis direction (A-axis). That is, after the distance between a substrate 1 and the lens 9 is set, when an XYA axis driven 15 is started, the distance between the substrate 1 and the lens 9 is varied as the substrate 1 moves longitudinally or laterally, and the lens system 10 is controlled in the A-axis direction by the driver 15 so that the beam condensing position is moved onto the surface of the substrate 1 according to the shape of the substrate. Thus, the lens system 10 of extremely light weight can be controlled with faint motion and three- dimensional substrate can be processed with high speed and high accuracy. |
