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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0350742(A)
申请公布日期
1991.03.05
申请号
JP19890186680
申请日期
1989.07.18
申请人
SEIKO INSTR INC
发明人
AOKI KENJI
分类号
H01L29/78;H01L21/205;H01L21/225;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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