| 摘要 |
A method for correcting the path of a gas laser beam by reflecting the beam with a first mirror, further reflecting such reflected beam with a second mirror, and then reflecting the beam reflected by the second mirror with a first half-mirror, passing such reflected beam through a condensing lens and then reflecting it with a second half-mirror. The beam passing through the first half-mirror is received by a first photodiode, and the beam passing through the second half-mirror is received by a second photodiode, and prior to the use of the gas laser, deviation of the beam passing through the first half-mirror is detected via the first photodiode to eliminate such beam deviation via actuators, and deviation of the beam passing through the second half-mirror is detected by the second photodiode to eliminate such beam deviation via another actuator, so that the path of the beam reflected by the second half-mirror is corrected to a given path.
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