发明名称 Hypoeutectic ohmic contact to N-type gallium arsenide with diffusion barrier
摘要 A hypoeutectic ohmic contact to gallium arsenide comprising a refractory metal layer is provided which reduces the outdiffusion of gallium and arsenic which would otherwise be seen as impurities at the outer surface of the ohmic contact.
申请公布号 US4998158(A) 申请公布日期 1991.03.05
申请号 US19870056076 申请日期 1987.06.01
申请人 MOTOROLA, INC. 发明人 JOHNSON, KARL J.;WEITZEL, CHARLES E.
分类号 H01L29/45 主分类号 H01L29/45
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