| 摘要 |
PURPOSE:In a device which is used in an expose so as to support a substrate, to prevent the deterioration of pattern formation accuracy by the vibration of the substrate during exposure by detecting the vibration of a substrate supporting part by a displacement sensor and performing rocking action so that it may offset the vibration. CONSTITUTION:In case that shock is added to a substrate supporting part 2, a Y direction acceleration sensor 6 detects the acceleration arising in the circumferential direction of a Z axis, and an amplifier 13 amplifiers it. The output signal of the amplifier 13 is given to a piezoelectric element 7 keeping the phase intact, whereby the vibration in Y direction can be suppressed. In this case, the gain of the amplifier is set, considering the output properties of the sensor and the properties of a vibrator (piezoelectric element), so that the vibrator may negate the displacement being caused at the peculiar frequency dominating the vibration in its constitution. Similarly, for the vibration in X and Z directions, the vibrations can be given using an acceleration sensor 10, a piezoelectric element 11, an acceleration sensor 8, and a piezoelectric element 9, respectively. But, as to the vibration in the X direction, from the positional relation between the acceleration sensor 10 and the piezoelectric element 11, there is necessity to give the piezoelectric element 11 a signal in reverse phase to the output of the acceleration sensor 10. |
