ZINC OXIDE SINTERED COMPACT, PRODUCTION AND ITS APPLICATION

摘要

PURPOSE:To provide the low-resistance sintered compact having an extremely good sintering density and specific resistance by specifying the ratio of the spinel structure constituted of zinc and dopant elements to the wurtzite type structure in the sintered compact. CONSTITUTION:The ratio of the spinel structure constituted of the zinc and dopant elements to the wurtzite type structure in this zinc oxide sintered compact doped with different kinds of the elements is below the ratio in the case in which all of the elements added as the dopant attains the above-mentioned spinel structure. This sintered compact has >=5g/cm<3> sintering density and <10mOMEGA.cm specific resistance. This sintered compact is produced by mixing the element X having positive tervalent and higher valency and the spinel structure oxide of zinc ZnX2O4 with the zinc oxide and sintering the mixture at >=1300 deg.C. The sintered compact has the extremely good performance as a sputtering target.