| 摘要 |
PURPOSE: To provide a diamond tool capable of machining at accuracies better than 0.1μm by allowing a tool carrier to move a workpiece against the resistance of resistance means through the expansion of a piezo-electric element caused by the application of a voltage. CONSTITUTION: A piezo-electric element 17 is partly put into a cylindrical space in a tool carrier 11 and mounted between a pair of ball bearings 18, 19, and an assembly of the ball bearings 18, 19 and the piezo-electric element 17 is held compressed by an adjustable screw 20 attached to the rear wall of a housing 6. When a voltage is applied between the terminals of the piezo-electric element 17 by an electricity feeding means, the piezo-electric element 17 expands and moves the tool carrier 11 against the resistance of plates 8, 10. The plates 8, 10 are capable of elastic deformation over the entire range of expansion of the piezo-electric element 17, and a hysteresis relating to the movements of the piezo-electric element 17 can be substantially decreased by holding the piezo-electric element 17 compressed between the ball bearings 18, 19.
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