| 摘要 |
PURPOSE:To restrain pulsation of laser gas caused by compression of positive displacement fan and to reduce pulsation of laser output by providing a pressure damping chamber to an output side of a heat exchanger inside a box of a cooling device. CONSTITUTION:Laser gas 5 passes through a cooling device 11B of a first step from pipings 8A, 8B, passes through a cooling device 11A of a second step from a positive displacement fan 6 and is fed to a discharge section of a gas laser oscillator. A pressure damping space 13 is formed up and down a heat exchanger 12 inside the cooling device 11A of the second step. Thereby, the laser gas 5 which is pulsated from the fan 6 and fed inside the cooling device 11A is cooled by the heat exchanger 12 and depressurized, and pulsation is thereafter damped in the wide pressure damping space 13. Therefore, laser output which is projected from an oscillator does not pulsate either, thereby realizing precision processing. Additionally, if a pressure damping is provided also to a cooling device 11B, effect can be further improved. |
