DECISION OF STRENGTH OF CERAMIC JUNCTION

摘要

PURPOSE:To accurately decide the strength of a junction part by allowing an ultrasonic wave to act on the surface of a ceramic junction part using an ultrasonic microscope to operate the residual stress based on the echo intensity cycle of an interference wave. CONSTITUTION:An ultrasonic microscope is constituted of a probe 5, a pulse transmitter 6, a receiver 7 and a data processor 8. A point P present at a predetermined interval from the bonded part on the surface of ceramic 1 in a bonded body to be decided is selected to be irradiated with converged ultrasonic beam B and the relative distance from the point P is changed to collect intensity data at every change of the relative distance of an interference wave by a receiver 7. The data processor 8 operates the residual stress at the point P on the basis of the cycle of the echo intensity of the interference wave to the change of the relative distance obtained on the basis of the collected intensity data. The strength of the ceramic junction part can be accurately decided on the basis of the residual stress.