| 摘要 |
<p>PURPOSE:To form a tip portion with a fine radius of curvature by forming a cold cathode material on the surface of an insulator substrate, forming a cold cathode with a projection and a gate electrode faced to the cold cathode, forming the cold cathode with the hood-shaped tip portion, and removing the hood-shaped portion. CONSTITUTION:An insulating film 6 is formed on the surface of a substrate 5, then a WSi film 7 is formed on the surface of the insulating film 6. A cold cathode 9 with a projection 8 and a gate electrode 10 are concurrently formed by photo-etching the WSi film 7. A recess 11 is formed below the tip section of the cold cathode 9 by isotropic etching, the tip section of the cold cathode 9 is formed in a hood shape, and an insulator substrate having a hood-shaped tip portion with the tip radius of curvature 0.1mum or below is formed below the cold cathode 9. The tip section 13 of the cold cathode 9 having the hood- shaped tip portion thus formed is folded along the insulator substrate below the cold cathode 9 with ultrasonic waves, thereby the cold cathode having a projection 14 with the tip radius of curvature 0.1mum or below is formed.</p> |
