| 摘要 |
PURPOSE:To obtain a highly accurate high sensitivity gas rate sensor by using at least four detection elements and mutually connecting the respective detection elements in series to enhance the resistance values thereof to a large extent. CONSTITUTION:When a current is supplied to an electrostriction vibration pump 4, a vibration plate 4a is vibrated and the gas in a pump chamber 12 is compressed and emitted to flow to a flow passage 13 to equally impinge against detection elements 7a - 7d through a nozzle orifice 8, an auxiliary orifice 9 and the space part 1b in a casing 1. This gas stream is discharged to the vibration plate 4a through gas guide holes 5a - 5d and circulated in the casing 1 in the direction shown by an arrow by the action of the pump 4. When no angular velocity is applied to the casing 1, the gas stream impinges against the elements 7a - 7d equally but, when angular velocity is added from the outside, the gas stream is deflected in the casing 1 and very small resistance value difference is generated between the elements 7a - 7d and, by measuring this difference value, the angular velocity applied to the casing can be detected. The number of the detection elements is many and angular velocity can be detected with high accuracy and high sensitivity. |
