| 摘要 |
PURPOSE:To accurately perform an appearance inspection for electronic parts at a high speed by making the most use of strong points of a camera, laser device and position detecting element, and complementing the mutual weak points thereof. CONSTITUTION:By observing the electronic parts P with a top camera 3 vertically from the upper direction and with side cameras 4 diagonally from the upper direction, a planar two dimensional picture information of the part P is obtained. The position detecting elements 8 are irradiated with the laser device 7 and the laser beam reflected by the parts P is received thereby to obtain the height information of parts P from the incident position of laser beam. Heights along the X,Y directions of a substrate 2 can be also obtained by the light receiving part 8. The laser beam is subjected to scanning along a soldering fillet, etc., by the device 7 in the manner of controlling a mirror angle. The cameras 3,4 and the position detecting elements 8 are connected to a control device 10 to perform a calculation of the soldering shape and a decision of acceptance or rejection in accordance with the information obtainable from the cameras 3,4 and the elements 8. At this time, the appearance inspection for multiple items on the parts P is performed while putting the cameras 3,4, device 7 and elements 8 to these proper use. |
