| 摘要 |
<p>PURPOSE:To eliminate human errors and overestimation from wafer traveling operation existing in general semi-conductor manufacture and move wafers after putting them in a prescribed order by providing a means for reading out a recognition number stamped on a semi-conductor wafer and arranging semi-conductor wafers according to the data saved in advance. CONSTITUTION:A wafer 8 is first in a wafer cassette 1. Next the wafer 8 is held and taken out by the vacuum pincette of a wafer traveling table 7. When the wafer passes a wafer number recognition device 2, the wafer recognition number 9 stamped in the wafer 8 is read out. The wafer recognition number 9 is fed to a wafer position calculator 3, and a wafer order is taken out according to the wafer recognition number 9 and a wafer order table in a memory 6.</p> |
