| 摘要 |
PURPOSE:To perform safely an operation by controlling at least one of a pressure reducing part and an atmospheric opening part, bringing the inside of a holding part to a specified pressure and suppressing a sudden pressure change in the holding part when suction is started. CONSTITUTION:A suction hole 4 sucks a sucked substance 3 and a holding part 6 holds the sucked substance 3 sucked at the suction hole 4. The sucked substance is moved through a suction path 5 from the suction hole 4 to the holding part 6. A vacuum pump 11 as a pressure reducing part reduces the pressure in the holding part 6 and a pressure sensor 7 as a pressure detecting part detects the pressure in the holding part 6 and an atmospheric opening tube 8 opens the holding part 6 to the atmosphere. In addition, a pressure controlling part 12 controls at least one of the pressure reducing part and the atmospheric opening part and bringing the inside of the holding part at a specified pressure to suppress a sudden pressure change in the holding part 6 when suction is started. It is thereby possible to stabilize the pressure in the holding part 6 and to avoid a rapid suction. |
