发明名称 Laminated silicon oxide film capacitors and method for their production.
摘要 <p>A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate (31, 41) and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer (33, 43) and an electrode layer (32, 44) laminated one on the other, and electrodes (32A, 32B, 32C, 46A, 46B).</p>
申请公布号 EP0414542(A2) 申请公布日期 1991.02.27
申请号 EP19900309256 申请日期 1990.08.23
申请人 TOSOH CORPORATION 发明人 SAKAI, NAOMICHI;KIKUSAWA, MASANAGA;KUBOTA, YOSHITAKA;YAMAMURA, HIROSHI;NAGATA, HIROYA
分类号 H01G4/10;H01G4/30;H01L27/08 主分类号 H01G4/10
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