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经营范围
发明名称
WAFER COOLING DEVICE
摘要
申请公布号
JPH0346235(A)
申请公布日期
1991.02.27
申请号
JP19890183084
申请日期
1989.07.13
申请人
FUJITSU LTD
发明人
YABUKI MASAAKI
分类号
H01L21/26;H01L21/324
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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