| 摘要 |
<p>PURPOSE:To suppress disconnection and the fluctuation in element area by disposing the lower layer metal of a nonlinear element on a glass substrate in such a manner that the step part of the above-mentioned metal parallels to the moving direction of the glass substrate and forming the lower layer metal by a sputtering method while moving the glass substrate in parallel with the step part of the lower layer metal. CONSTITUTION:The lower layer metal 2 consisting of Ta and wiring 5 are formed on the glass substrate 1. The glass substrate 1 is so disposed that the step part of the lower layer metal 2 parallels to the moving direction of the moving direction of the glass substrate. While the glass substrate 1 is moved in the direction of an arrow 8, ITO is formed as the upper layer metal 4 and picture element electrode 6 for liquid crystal driving according to sputtering conditions. The step coverability varying according to the moving direction of the glass substrate 1 is, therefore, uniformized. The disconnection and the fluctuation in the element area are lessened in this way.</p> |
