ION IMPLANTATION DEVICE,申请号JP19890178787-传众专利搜索

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发明名称	ION IMPLANTATION DEVICE
摘要
申请公布号	JPH0344467(A)	申请公布日期	1991.02.26
申请号	JP19890178787	申请日期	1989.07.10
申请人	NISSIN ELECTRIC CO LTD	发明人	HIRAMATSU TSUNEO
分类号	C23C14/48;C23C14/56	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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