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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0344929(A)
申请公布日期
1991.02.26
申请号
JP19890179176
申请日期
1989.07.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NISHII KATSUNORI
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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