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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0342872(A)
申请公布日期
1991.02.25
申请号
JP19890178811
申请日期
1989.07.10
申请人
SEIKO INSTR INC
发明人
HOSAKA TAKASHI
分类号
H01L29/78;H01L29/08;H01L29/10
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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