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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0342834(A)
申请公布日期
1991.02.25
申请号
JP19890178506
申请日期
1989.07.11
申请人
SEIKO EPSON CORP
发明人
YAMAMOTO HIROSHI
分类号
H01L21/768;H01L21/318;H01L23/522
主分类号
H01L21/768
代理机构
代理人
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地址
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