发明名称 TRANSFER DEVICE
摘要 PURPOSE:To simplify the structure of a moving mechanism whole body and to improve the positioning accuracy at transfer work time of a retained body by taking an actuator for driving a holder as an air cylinder, providing a stopper to stop movement of the holder and also providing a dumper to control speed of the holder. CONSTITUTION:A Z table 2 is fitted movably in about vertical direction along a Z table guide 3 extended on a foundation bed 1 and a Z table moving mechanism 4 to drive and operate the Z table 2 is fitted to the bed 1. A jig cylinder 5 formed by an air cylinder as an actuator for driving is fitted to the Z table moving mechanism 4, a stopper 6 is interposed between the movable parts of linear dumpers 7, 8 at the side part of the Z table 2, dumping is acted over the whole range of the stroke of the movable part of the jig cylinder 5 and the moving speed is held in about constant state. The structure of the whole moving mechanism is thus simplified and the positioning accuracy at the transfer work time of the retained body can be improved.
申请公布号 JPH0343185(A) 申请公布日期 1991.02.25
申请号 JP19890178082 申请日期 1989.07.12
申请人 TOSHIBA CORP 发明人 SUZUKI RYOICHI;NOMURA TAKEHIKO;FURUYA TOSHIMASA
分类号 B65G43/00;B25J19/00;G03F7/20;H01L21/027 主分类号 B65G43/00
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