| 摘要 |
PURPOSE:To automatically set a PID constant for a measured temp. by providing a table which determines the PID constant (P denotes a proportional action, I an integral action and D a differential action, respectively) for the temp. and referring to this table. CONSTITUTION:A control device 11 determines the first measured temp. from among set measurement conditions and announces the measured temp. via a biaxial goniometer controller 12 to a temp. monitor device 14. The monitor device 14 refers to the PID table 15 and determines the PID constant of a temp. sample base 21 for the measured temp. The PID constant of the temp. sample base 21 for the temp. range is stored in the PID table 15 and the monitor device 14 reads out the PID constant of the temp. range where the measured temp. is included, by which the PID constant is determined. As a result, an operator is merely required to first assign all the measured temps. and the PID constant is automatically selected and the temp. control is executed; therefore, the continuous and unattended measurement at the various temps. is possible. |
