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发明名称
PROBE CARD
摘要
申请公布号
JPH0342574(A)
申请公布日期
1991.02.22
申请号
JP19890178463
申请日期
1989.07.11
申请人
NIPPON DENSHI ZAIRYO KK
发明人
OKUBO KAZUMASA;OKUBO MASAO;YOSHIMITSU YASUYOSHI;SUGAYA KIYOSHI
分类号
G01R1/073;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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