| 摘要 |
PURPOSE:To improve wear resistance and lubricating property by incorporating silicon (Si) and fluorine (F) into an amorphous carbon film which contains hydrogen. CONSTITUTION:Silicon (Si) and fluorine (F) are incorporated into the amorphous carbon film which contains hydrogen. Namely, hydrogen intrudes into dangling bonds of carbon atoms to close the carbon chain and stabilize the amorphous state. By adding various kinds of elements into the amorphous carbon film, effects on adhesion, hardness and surface smoothness can be obtained. Particular ly by adding Si, adhesion property is improved, and by adding F, surface lubri cating property can be improved. |
