| 摘要 |
<p>PURPOSE:To allow the simultaneous measurement of weight and humidity and the temp. compensation of a weight measurement by the same element by forming 1st, 2nd, 3rd electrode films on an insulating substrate and a moisture sensitive substrate, thereby integrally constituting a weight detecting part and a humidity detecting part. CONSTITUTION:The 1st electrode film 2 is formed on the surface of the insulating substrate 1. The 2nd electrode film 4 and the 3rd electrode film 5 are formed on both surfaces of the humidity sensitive substrate 3 made of porous ceramics and the substrates 1, 3 are fixed apart a specified spacing by an adhesive layer 6. The electrostatic capacity between the electrodes 2 and 4 increases if load is impressed on the substrate 1. The weight is detected by a change in this capacity value. Since the resistance value of the substrate 3 decreases sharply with an increase in humidity, the humidity is detected from a change in the resistance value between the electrode films 4 and 5 and the electrostatic capacity value is corrected according to the detected humidity.</p> |
