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发明名称
ORGANOSILICON POLYMER AND ITS PRODUCTION AND USE
摘要
申请公布号
JPH0341121(A)
申请公布日期
1991.02.21
申请号
JP19890176162
申请日期
1989.07.07
申请人
FUJITSU LTD
发明人
OIKAWA AKIRA;FUKUYAMA SHUNICHI
分类号
H01L21/312;C08G77/48;C08G77/50
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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