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发明名称
DILUTED GAS SUPPLY DEVICE
摘要
申请公布号
JPH0340991(A)
申请公布日期
1991.02.21
申请号
JP19890177597
申请日期
1989.07.10
申请人
FUJI ELECTRIC CO LTD
发明人
YADA HISASHI
分类号
C30B25/14;C23C16/44;C23C16/455;H01L21/205;H01L21/31
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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