| 摘要 |
<p>A three dimensional binary optic microlens structure (12) is fabricated within a radiation receiving back surface of a substrate (16) of a radiation detecting array (10). The microlens has a structure predetermined to achieve a concentration of optical radiation within a desired spot size at the plane of a detector (18), thereby facilitating the provision of detectors of reduced active area. The incident radiation may be planar or may be prefocused by externally provided optics. The methods of the invention determines a binary optic microlens solution to a Fresnel lens which achieves the desired optical concentration, the method further providing at least one fabrication masking layer upon the back surface of the array and the selective removal of material from the back surface of the array to create the microlens structure.</p> |
