| 摘要 |
<p>An apparatus and method for particle detection which includes a plurality of sample regions (74, 76, 78, 80). A sensor body (14) has internal walls which define spaced apart sample regions having an inlet port (36) and an exhaust port (60). An aggregate sample flow (B) which are directed from the inlet port to the exhaust port of an associated sample region, particles contained within the partial sample flows (B) scatter light as the particles pass through the incident beam (68). The light from a sample region (74, 76, 78 or 80) is directed to a photodetector (94, 96, 98 or 100) which provides a signal corresponding to the sensed light. Particle detection in each sample region is operationally independent of the others, but the information is combined to provide a total particle count of the aggregate sample flow. Alternatively, the apparatus may be utilized to provide simultaneous particle detection of separate sources of particle-bearing gas. For example, adjacent clean room areas may be monitored channelling separate sample flows directly into separate inlet ports of adjacent sample regions.</p> |
