| 摘要 |
PURPOSE:To obtain ceramic substrates at a low rate of rejects due to cracking while maintaining a low rate of rejects due to warpage and small max. warpage by setting a required number of ceramic green sheets on a setter, putting a porous ceramic plate on the green sheets and sintering the green sheets. CONSTITUTION:Plural ceramic green sheets of aluminous or magnesian refractory aggregate, etc., are set on a setter, a porous ceramic plate preferably having 1.0-1.5g/cm<3> density and 1-30mm thickness is put on the green sheets and the green sheets are sintered to obtain ceramic substrates. |
