| 摘要 |
PURPOSE:To obtain a conductive ceramic formed article capable of being formed into an optional shape and which is not broken even when heated and cooled rapidly by filling a ceramic consisting essentially of silicon carbide into the pores of a thermal-shock-resistant porous ceramic having many pores communicating with the surface. CONSTITUTION:The porous ceramic is formed with a ceramic having >=400 deg.C thermal shock resistance such as silicon nitride, silicon carbide, Sialon, cordierite and zirconia and has many pores communicating with the surface. A conductive ceramic consisting essentially of silicon carbide is filled into the pores to form a phase communicating with the surface. Consequently, a conductive ceramic formed article is obtained and used as a ceramic heater, etc. The conductive ceramic is preferably obtained by calcining an organosilicon polymer (e.g. polysilane, polycarbosilane and polysilastyrene). |
