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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH0340357(A)
申请公布日期
1991.02.21
申请号
JP19890174591
申请日期
1989.07.05
申请人
NEC CORP
发明人
IWASHIMA TERUAKI
分类号
H01J37/20;H01J37/317;H01L21/265
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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